Modeling And Analysis Of The Breakdown Curve Of A High-Frequency Discharge In Hydrogen

Abstract The subject of this study is the construction of the breakdown curves of a RF discharge in hydrogen. Based on previously developed by the authors breakdown criteria the breakdown curves of a discharge in hydrogen were analytically constructed for the first time. Very good coincidence between the proposed analytic breakdown criteria and known in literature experiment data is obtained. A comparison is made with other breakdown criteria developed earlier. It is found that the positive and negative electric fields occurred in the discharge influence each other.