Investigation On The Optical Electrical And Structural Properties Of ITO On Glass Substrate

Abstract This thesis paper is mainly focus firstly deposited ITO thin films on glass substrate as good transparent conducting electrode as low resistivity and high optical transmittance. Indium tin oxide ITO thin films have been deposited on glass substrate to be used as transparent conducting electrode.ITO has been deposited by using electron beam evaporation E-beam method. The surface morphology of ITO films was investigated by AFM and also studies the electrical and optical properties of these films. The effect of annealing of the ITO was also investigated. It was found that the conductivity of ITO film was proportional to the annealing temperature and time below 600C. The surface morphology of ITO films for different annealed temperature has been also investigated by AFM and it was found that surface roughness of ITO film increase with annealing temperature.