MEMS Technology
Journal: International Journal of Scientific Engineering and Technology (IJSET) (Vol.3, No. 1)Publication Date: 2014-01-01
Authors : Popat R. Thorat Shilpa M. Gaikwad;
Page : 31-35
Keywords : Electrostatics; Electromechanics; MEMS; pullin voltage;
Abstract
“Micromechatronic is the synergistic integration of microelectromechanical systems, electronic technologies and precision mechatronics with high added value.”This field is the study of small mechanical devices and systems .they range in size from a few microns to a few millimeters. This field is called by a wide variety of names in different parts of the world: micro electro mechanical systems (MEMS), micromechanics, Microsystems technology (MST), micro machines .this field which encompasses all aspects of science and technology, is involved with things one smaller scale. Creative people from all technical disciplines have important contributions to make. A world now occupied by an explosive new technology known as MEMS (Micro Electro Mechanical systems).
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Last modified: 2014-01-06 00:22:42