Differential MicroscopyImprovement Techniques Based on Position Sensitive Detectors

Abstract—Position Sensitive Detector (PSD) have applications in microscopy systems. In our previous research, the many error factors that are caused by the pincushion-type distortion of these sensors were investigated and addressed to significantly reduce signal to noise ratio in PSD and the microscopy system. To achieve further improvements for the microscopy system an algorithm based on localized differential method can be used. This novel approach is implemented in this research resulting in significant improvement in the precision of the microscopy system. Keywords— Differential Microscopy; Position Sensitive Detector; Localized differential method; Microscopy systems; PSD; Sensor calibration;