Share Your Research, Maximize Your Social Impacts
CONTROL METHODS OF MOLECULAR POLLUTION IN CLEAN ROOM FACILITIES OF THE SEMICONDUCTOR INDUSTRY
Journal: Science and world (Vol.1, No. 2)Publication Date: 2013-10-28
Authors : Sevryukova E.A.;
Page : 71-72
Keywords : aerosol; efficiency; standard; control; molecular pollution; clean room.;
Source : Download Find it from : Google Scholar
Abstract
The methods of measurement of fugitive molecular pollution in clean room facilities of the semiconductor industry are considered, the options of technical solutions for decrease in the level of pollution at the stages of design and installation are offered in the article.
Other Latest Articles
- INFLUENCE OF PERSONAL TASTE OF CUSTOMER ON FORMATION OF CHURCH ARCHITECTURE OF THE SOUTHERN URALS
- RISK ASSESSMENT FROM NOISE IMPACT AT WORK PLACES OF THE CONCRETE GOODS ENTERPRISES
- ENERGY SAVING HEATING SYSTEM WITH USE OF ?HEAT PUMP UNIT?
- DEVELOPMENT OF THE SYSTEM FORCOMPUTER-AIDED PROCESSING OFSURFACE LASER SCANNING DATA
- COMPARISON OF EFFICIENCY OF HEAT RECOVERY SYSTEMS BY THE METHOD OF ASSOCIATIVE DIAGRAMS
Last modified: 2014-07-21 15:38:11