Design of Ultrasonic Transducer MEMS Model for Distance Measurement using Multiphysics

The technique in artificial ultrasonic transducer using electronics is very bulky and power hungry. W e switched over to ultrasonic Micro - Electronics Mechanical Systems (MEMS) which have shown significant importance for miniaturized mechanical system, based on silicon technology. MEMS based acoustic sensing transducers commonly employ the piezo - electric technolog y to interpret the received ultrasonic reflection. Prior to fabrication of MEMS device design simulation s are extensively need ed to avoid expensive time and cost. The aim of the present work is to describe the design of different lead free piezoelectric materials based ultrasonic transducer and their performance. COMSOL Multiphysics 4.2a is versatile tool and is used to design and solve the transduce r device with 3D partial differential equations. In this paper, 2D axis - symmetry model geometry of piezoelectric transducer was designed with lead free piezoelectric material like Barium Sodium Niobate (Ba2NaNb5O15) which is capable of being used as thin f ilm. The potential of 20 Volts with 140 KHz frequency was applied to the device that was inside geometry of cylindrical air medium. The surface and radial displacement of the transducer structure of the material with pressure and stress were studied in air medium.