AUGER SPECTROMETRY AND X-RAY PHOTOELECTRON SPECTROSCOPY ANALYSIS OF TITANIUM COATING ON NACL SUBSTRATE FOR DENTAL IMPLANT APPLICATIONS

Titanium coatings were preparing on NaCl substrate using R.F. magnetron reactive sputtering in order to make chemical analysis for dental implant applications. The analysis of the structure by electron microscope revelated that the titanium coating have ?a? lattice constant related to the mode of deposition and the experimental conditions. The qualitative analysis by Auger Spectrometry and X-ray Photoelectron Spectroscopy (XPS) showed that the titanium dental films contained at least on the surface a large amount of carbon and oxygen. The increase of the lattice constant ?c? for titanium was attributed to the incorporation of impurity atoms. Any significative difference in grain size with respect to titanium deposits regardless of the deposit conditions was observed.