ResearchBib Share Your Research, Maximize Your Social Impacts
注册免费获得最新研究资源 注册 >> 登录

STARTING POINT SELECTION IN GROUPING DESIGN METHOD FOR LITHOGRAPHIC OBJECTIVES

期刊名字: Scientific and Technical Journal of Information Technologies, Mechanics and Optics (Vol.19, No. 5)

Publication Date:

论文作者 : ;

起始页码 : 790-800

关键字 : lithography; optical design; projection lens; DUV; UV; global search algorithm; starting point;

论文网址 : Downloadexternal 您也可以查找论文通过 : Google Scholarexternal

论文摘要

This work aims on method development for obtaining initial designs for ultraviolet (UV) and deep-ultraviolet (DUV) objectives through global search algorithm. We studied a global search based algorithm tending to obtain the feasible local minima of lens design landscape. One of the major challenges of our work is writing macro input related to a number of lenses, the length of objective, and glass material. The obtained results show the main advantages and efficiency of the design approach based on the global search algorithm. As an output, we developed a method and criteria for successful selection of the starting point of micro-lithographic objectives.

更新日期: 2019-10-23 19:00:18