Sensitivity Enhancement using MEMS Materials

In this paper, we have done some analysis on different kind of materials which is available in MEMS module in FEM based Multiphysicsenvironment. The major step is to do sensing materials and sensitivity analysis of Micro Electro Mechanical systems(MEMS). One interesting fact we have observed that with less applied force we can get more sensitivity if material is more sensitive. However our main intention is to get high sensitivity with more displacement and less force. There are many materials in different areas those can be used for sensing in sensors like metals, semi-conductors, polymers etc.,here we are choosing material to get best output and good performance characteristics