The Discharge Pressure and Longitudinal Magnetic Field Dependence of Plasma Parameters via Optical Emission Spectroscopy at the Magnetron Sputtering System

In this work, plasma parameters can be accurately calculated when the intensities of two spectral lines are experimentally known. The magnetic field effect on the plasma parameters and the intensity spectrum for glow discharge in argon at low pressures has been investigated by using optical emission spectroscopy technique. The longitudinal magnetron system used in this work, where the open field unbalanced magnetron was employed at the cathode and anode electrode. The plasma parameters have been studied inpresence of magnetic field of 855 Gandargon gas pressure ranges from (0.25 to 0.85) mbar. Applying a longitudinal magnetic field yields confining the plasma near discharge electrodes. This confining corresponds to the maximum enhancement of the spectral lines intensity (ArI 750.3nm and ArII 434.7nm) and the electron density is a maximum. In the presence of the magnetic field, the values of the electron temperature Te are smaller than that without magnetic field. An increase in gas pressure, rustling slightly decrease of plasma density at low gas pressure (0.33 mbar) but it increased at higher gas pressure. Also, results show that the electron temperature drops slowly as pressure is increased from (0.25 to 0.5) mbar, but is relatively drops rapidly at higher pressures of 0.85 mbar and the maximum values of this parameter are obtained at 0.33 mbar pressure.