Effect of Secondary Electron Emission Product Factor on Electron and Ion Densities and Electron Kinetic Energy for Ar Gas Discharge Plasma by using OOPIC PRO Simulation Code

In this research, Ar gas discharge plasma was simulated by using OOPIC Pro simulation code. The conditions of the simulation were adopted at simulation time 10-6s, initial electron and ion densities 1016m-3, Ar gas pressure 0.5mbar. Electron and ion densities and electrons kinetic energy were investigated by varying secondary electron emission product factor () and fixing other simulation factors. For =0.1, 0.2 and 0.3 it has been found that kinetic energy of electron and electron and ion densities will be affected, the results have been analyzed and discussed.