Detecting of NH3, CO2 polluted gases by using ZnO- In2O3 thin films

Polycrystalline ZnO-In2O3 thin films for gas sensor were prepared on to glass substrates by using spray pyrolysis method from solution of 0.1 M ZnCl2 and 0.1M InCl3 at 300 o C temperature and 100 course of spray. A number of techniques including X-ray diffraction (XRD), atomic force microscope (AFM) and scanning electron microscope (SEM) are used to study the morphology of ZnO-In2O3 thin films. Polycrystalline structured of as-obtained films was confirmed by using these techniques. Optical properties, and sensitivity of thin film to NH3, CO2 gases was also studied.