Effect of Radiation on the properties of ZnO Films and Substrates

Zinc oxide (ZnO) films and substrates are important and attractive materials for applications in several fields. The Properties of ZnO films, glass and ZnO/ glass have been studied by using ion beams. The effects of glass substrates on physical properties of ZnO films have been investigated. Details of calculations methods and results are given and discussed. The calculated values were compared with the published data. Good agreement between our results and published data is obtained.