Elastic-Plastic Properties of hard Cr-Based Nitride Coatings Deposited at Temperatures Below 200°C

Sets of Cr-based hard coatings were prepared via reactive closed field unbalanced magnetron sputtering (CFUBMS). Substrate temperature was kept in range of 150 to 200°C during deposition. Nanohardness (H) and effective modulus of elasticity (E*) of the coatings were examined, using depth-sensing indentation method. In order to present the mechanical properties and predict the tribological behaviour of the prepared coatings ratios H/E* (elasticity index), H3/E*2 (resistance to plastic deformation) and 1/(HE*2) (resistance to crack formation) were calculated and analysed. The results from the combined examination of the research ratios showed that they could be used for classification of the expected wear-resistant properties of Cr-based hard coatings deposited at temperature below 200°C.