Study The Structural and Optical Properties of Fe2O3 Thin Films Prepared by RF Magnetron sputtering

Fe2O3 thin films were deposited by reactive R.F. magnetron sputtering method on glass substrates with different thicknesses 50 and 100and 370 nm. The structure of Fe2O3 thin films was tested with the X-Ray diffraction and it was formed to be amorphous and after annealing becomes single crystal with recognized peak in (003). The surface morphology of the deposits materials have been studied by using atomic force microscope (AFM). The grain size of the nanoparticles observed in the range of (66.3), (72.37) and (79.23) nm for the thickness of 50, 100 and 370 nm respectively. The optical properties concerning the absorption and transmission spectra were studied for the prepared thin films.