REVIEW PAPER ON MEMS DOMAIN

MEMS is a new manufacturing technology, a new way of making complex electromechanical systems using batch fabrication techniques similar to the way integrated circuits are made and making t hese electromechanical elements along with electronics. Since MEMS devices are manufactured using batch fabrication techniques, similar to ICs, unprecedented levels of functionality, reliability, and sophistication can be placed on a small silicon chip at a relatively low cost. MEMS technology is enabling new discoveries in science and engineering such as the polymerize chain reaction (PCR) Microsystems for DNA amplification and identification, the micro machined scanning tunneling microscopes (STMS), bioch ips for detection of hazardous and selection. In the industrial sector, MEMS devices are emerging as product performance differentiates in numerous markets with a projected market growth of over 50% per year. As a breakthrough technology, allowing unparall eled synergy between hitherto unrelated fields of endeavour such as biology and microelectronics, many new MEMS applications will emerge, expanding beyond that which is currently identified or known