RECENT ADVANCES IN MEMS SENSOR TECHNOLOGY ? BIOMEDICAL, MECHANICAL, THERMO-FLUID & ELECTROMAGNETIC SENSORS

MEMS has been identified as one of the most promising technologies for the 21st Century. Trend toward smaller size, higher performance, and greater functionality for electronic devices is made possible by the success of solid-state microelectronics technology. Current MEMS devices include accelerometers for airbag sensors, inkjet printer heads, computer disk drive read/write heads, projection display chips, blood pressure sensors, optical switches, microvalves, biosensors and many other products that are all manufactured and shipped in high commercial volumes. Its techniques and micro system-based devices have the potential to dramatically affect of all of our lives and the way we live. So we will try to utilize advantages of the MEMS sensor technology in most of the important applications such as Bio-sensing and bioinspired sensors, which are making an impact on technological development, innovation and progress in biomedical applications, mechanical sensors, thermo-fluid and electro-magnetic domains.