ASPECTS OF DOUBLE MASS ON TUNING FORK MEMS GYROSCOPE

MEMS gyroscope provides high performance and low cost for improving directional estimation and overall accuracy in the navigation systems. This paper presents a double mass tuning fork gyroscope (TFG) to improve their sensitivity and better resolution. The perforated proof mass [1] used in the design enables the reduction of the damping effect. This gyroscope has two modes- drive mode and sense mode. The driving force is given in the x direction and the displacement due to the Coriolis Effect is sensed in the y-direction. The device is driven at its natural frequency and the response of the device is analyzed at static and dynamic state. The TFG produced a better displacement 5.2 × 10-9m after applying force. The frequency range applied is 0.053- 0.24 MHz. to get better resolutions and displacement.