Study On Artificial Hair MEMS As Flow Cell Sensors Application

Abstract This paper presents the mechanical modelling and finite elements analysis FEA based on cantilever and artificial hair cell MEMS as flow sensors. The structure of this biomimetic flow sensor consists of a single cylindrical hair cell which is perpendicular to a cantilever length of 10000m. The Sensor performance is measured by the distribution of Stress occurrence and displacement. In order to study the sensor force of 0.02N represent gas flow the force which is applied to cylindrical hair cell variation of the width of cantilever and height of the cylindrical hair cell. The FEA result shows the highest stress occurred as the width of the cantilever decrease while the displacement increase also when the width of cantilever decrease.