Measurement System for Nano-order Vibrations

Due to the rapid growth of the high technology industries, the quality requirements of the components become more stringently. The most important property of the micro-relay is the resonant frequency. The Young’s modulus and residual stress can be calculated by the resonance frequency of the relay. In the fast development of the technological of the integrated circuits, the product dimensions have been miniaturized. It is difficult to measure objects with the line width of 600 nm. And the scanning detection can be artificially controlled and verified only. The main purpose of this study is to construct a novel Michelson interferometer which offers the automatic measurement and calculation, analysis and accumulating signal data, and the experiemental results show that the measuring range of frequencies less than 450 kHz and amplitude over 5 nm can be achieved by the proposed automatic measurment system.