A Review of MEM Sensors
Journal: International Journal of Application or Innovation in Engineering & Management (IJAIEM) (Vol.4, No. 11)Publication Date: 2015-12-20
Authors : Rupali Thorat; Varsha Pande;
Page : 101-104
Keywords : Keywords: MEMS Technology; Fabrication Techniques; MEM Sensors; Smart Sensor;
Abstract
ABSTRACT This paper presents What is MEM’s technology ,which are different fabrication techniques of MEMS, MEMS technologies are the rising star in the sensors market. MEM sensors are smart sensors , application of MEMS Sensors in different areas , Future scope of MEM Sensors
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Last modified: 2015-12-14 15:02:16