An Ionic Liquid Based Sensor Using Coplanar Electrode Design for Pressure Measurement

These paper report the development of an ionic liquid based sensor for pressure measurement. Enhancement of the sensor design with complex fabrication techniques, due to changes in the geometry layer will affect the mechanical properties of the sensor. Due to this problem, the ionic liquid based capacitive pressure sensor using Polydimethylsilaxone fluidic systems is proposed. The proposed sensor consists of membrane, microchannel and coplanar electrodes. Polydimethylsiloxane (PDMS) material is chosen for main material based on its potential properties in fluidic systems and the soft lithography technique is used to form a PDMS structure. The fluid mechanism inside the microchannel sensor is validate between the experiment and analytical result. Ethanol is chosen as an ionic liquid due to its property that has low kinematic viscosity. The characterization process including pressure measurement, sensitivity, and linearity were carried out. From the experimental results, the sensor sensitivity is 0.072 pF/kPa