Interrelation of Friction-Wear and Mechanism of Energy Dissipation for MEMS Application

Adhesion is a predominating force in Micro electro mechanical System (MEMS) due to high surface to volume ratio. In the present study of MEMS surfaces contact, adhesional friction force and adhesive wear volume have been computed numerically and new interrelation in between the wear and friction is developed after, finding their ratio. Also, mechanism of energy dissipation has been summarized on the basis of Arrhenius theory of mechanochemical reaction under working condition of MEMS devices.