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Effect of Residual Stress of Different Materials on Performance of Chevron Beam Actuator
Journal: International Journal of Current Engineering and Technology (Vol.3, No. 1)Publication Date: 2013-03-01
Authors : Neha Jain Dinesh Arora; Sandeep Kumar;
Page : 43-45
Keywords : MEMS; Actuators; Electrothermal; Chevron; Residual Stress;
Source : Download Find it from : Google Scholar
Abstract
This paper reports the effect of residual stress of different materials on displacement of the actuator. This study has been done by designing and simulating the microactuator using COMSOL Multiphysics 4.2a. The behaviour of the microactuator is studied for different materials like polysilicon, gold, nickel, copper and argentum at an applied potential difference of 4V between the contact pads.
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Last modified: 2013-01-22 21:22:17