Devices for measuring the capacitance of micromechanical sensors of mobile robots navigation systems and its deviation from the nominal value

The article describes methods of constructing devices for measuring the capacitance of micromechanical sensors (accelerometers and gyros) mobile robots navigation systems and itsdeviation from the nominal value. A modified diagram of a sigma-delta modulator is offered. It realizes a direct connection capacitive sensor connection to the sigma-delta converter, as a result increased resolution, accuracy and linearity of the conversion. This interface is insensitive to the value of capacitance between the sensor leads and common wire or leakage current to a common wire. Variants of expansion as the nominal of the test capacity and the range of conversion of the relative deviation of the nominal capacity using two integrators are offered. The versions of circuit implementation devices for measuring the capacitance deviation of a micromechanical sensor from the nominal value are designed on the basis of the completed integrated circuit AD7745 / AD7746 and AD7747 of Analog Devices, CAV414 / 424 firm Analog Microelectronics and precision analog microcontroller ADuCM360 / CM361 company ARM Limited.