SPECTRO-STRUCTURAL-MORPHOLOGICAL STUDY OF RUTHENIUM OXIDE THIN FILM

There is a growing necessity of transition metal oxide thin film for many important technological applications such as smart windows gas sensors, solar cells, super capacitors etc. Among the other transition metal oxides, ruthenium oxide is a potential material as it exhibits interesting structural, optical, chemical, electrical properties. In this investigation ruthenium oxide thin films have been synthesized using spin coating technique. Here ruthenium oxide thin films have been deposited on stainless steel substrate by sol-gel spin coating method. Thin film properties of deposited samples were studied by XRD, SEM, FTIR, and EDAX.AFM. The XRD pattern showed sharp intense peaks conform crystalline structure and indicating tetragonal structure of ruthenium oxide. The SEM images of ruthenium oxide thin films showed total coverage of thin films. The thin film had a dense layer covered by agglomeration of particles forming a porous structure. At higher magnification (X 40,000) a porous structure of ruthenium oxide