Deposition of Nanocrystalline WO3 and CuO Thin Film in View of Gas Sensor Applications

The authors present the investigation results on nanocrystalline CuO and WO3 thin films obtained by magnetron sputtering technology. The films phase composition, microstructure and surface topography have been assessed by XRD (X-ray Diffraction), GIR (Grazing Incidence Reflectometry), SEM (Scanning Electron Microscope) and AFM (Atomic Force Microscope) methods. The obtained multilayer structures were investigated as gas sensitive materials after exposure to NO2 and CO gases in 2 - 200 ppm range. The maximum sensitivity was measured in the region of 180-200oC for both oxidizing and reducing atmospheres, what enables the sensing layer to be used in portable gas sensor applications.