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Gas Velosity and Mass Flowrate Scaling Modeling in Microelectronics’ Thermal Control Systems

Journal: REFRIGERATION ENGINEERING AND TECHNOLOGY (Vol.53, No. 6)

Publication Date:

Authors : ;

Page : 35-38

Keywords : Flow; Microchannel; Model; Velocity Scaling Law; Knudsen Flow Regime; Flowrate Scaling; Microelectronics Thermal Control Systems;

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Abstract

In the present research we investigate pressure driven flow in the transition and free-molecular flow regimes with the objective of developing unified flow models for microchannels. These models are based on a velocity scaling law, which is valid for a wide range of Knudsen number. Simple slip-based descriptions of flowrate in microchannels are corrected for effects in the transition and free-molecular flow regimes with the introduction of a rarefaction factor. The resulting models can predict the velocity distribution, mass flowrate, pressure and shear stress distribution in rectangular microchannels in the entire Knudsen flow regime.

Last modified: 2018-12-04 20:12:32