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CALCULATION OF PARTIAL COEFFICIENTS OF THE SPUTTERING OF TWO-COMPONENT HOMOGENEOUS TARGETS BY LIGHT IONS
Journal: Science and world (Vol.1, No. 64)Publication Date: 2018-12-19
Authors : Manukhin V.V. Manukhin M.V. Stepanova A.P.;
Page : 15-18
Keywords : sputtering; ion bombardment; multi-component materials; partial sputtering yield; preferential sputtering; light ions.;
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Abstract
An analytical model of the sputtering of multicomponent targets by light ions has been developed. An analytical formula has been obtained, which makes it possible to calculate the total and partial sputtering coefficients of a binary (multicomponent) target with light ions. The calculation results are in good agreement with the experimental data. The patterns of preferential sputtering of two-component materials at low energies are revealed.
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Last modified: 2019-01-10 19:29:32