Fourier Transform Infrared Spectroscopy-guided Identification of Foreign Materials

The identification of the nature of foreign materials (FM) provides direction on the determination of the source, and guidance on the mitigation or elimination of its occurrence. Herein, we identified the most probable composition of the FMs found on adhesive tape or trays, in a semiconductor assembly floor. Fourier transform infrared (FTIR) spectroscopy was used to identify the composition of the unknown samples, through database matching. The database is a locally built library of spectra of materials available in the production floor. The results show successful identification of the FMs