Studying the Effect of AC Source’s Frequencies to Micro Electromechanical System

This paper presents an actuation method for the Fabry-Pérot (FP) optical filter (Micro Electromechanical System) using the electrostatic force in order to get the desired wavelengths. To control this force, DC source is conventionally used to actuate but the stability is not high. To overcome this problem, in this work we apply an AC actuation at several frequencies and study the effect of the frequencies to control quality. The experimental results with high accuracy and high stability are shown.