Finite Element Analysis of Micro Beam in a MEMS-Based Microfluidic Channel

It is well known that the physical properties of a micro beam are largely dependent on the fluid and micro channels in which the beam is immersed. In this study, the finite element analysis of the micro beam within the microfluidic channel based on MEMS (Micro-Electro-Mechanical Systems) is aimed to be made in detail. These analyzes include von Mises stress, pressure quantities, velocities, and displacements during movement. Using the Euler-Bernoulli equation for the beam, a micro-beam fixed in a fluid is modeled and analyzed. Unstable Stokes equations are solved using a Helmholtz decomposition technique in a two-dimensional plane containing micro-beam sections. The finite element method using the Comsol Multiphysics software results is compared with the current validation method, and an acceptable match is obtained between them. Pressure, velocity, and displacement analyzes were created by ensuring all boundary conditions. The current formulation has been shown to be a suitable and novel approach to solve the problem with good accuracy. As a result, a theoretical model is provided that can be used in the design and interpretation of density, viscosity, and microfluidic sensors.