Fabrication and Performance of a Surface Acoustic Wave Resonator Based Chemical Sensor

The fabrication and performance of a SAW resonator based chemical sensor designed at center frequency of 500 MHz is described for detection of Sarin (DMMP). The resonator and reflector grating element width (critical dimension) was 1.69 micron. The mask was fabricated and subsequently, the SAW resonator was fabricated on ST-Quartz substrate. The performance of resonator demonstrated resonance at 505.7 MHz (insertion loss within 6 dB). The sensing curve of the prepared SAW sensor with exposure to 3 ppm DMMP vapours showed a frequency shift of 700 Hz (233 Hz/ppm).