Design and Performance Studies of the Scanning Magnetron in Terms of V-I Characteristics, Dependence of V-I Characteristics on Scanning Speed, Deposition Rate and Substrate Temperature

A scanning magnetron target in fig-1 is designed in the present study in this study the target is scanned by the magnetic field of a moving magnet fitted in a boat shaped magnet holder on the cathode plate. The scanning of the target by magnet holder initiate ejection of the material from scanned target surface toward the substrate leading thereby a uniform and deposition of a uniform film over wide substrate area. V-I Characteristic in fig-2 of the currently developed scanning magnetron is studies at different T. S. D.5, 8, 11 cm and pressure 5x10-3, 1x10-3, 8x10-4, 6x10-4, 4x10-4m bar. V-I charateristcs in fig 3 of the scanning magnetron is measured for different scanning speed viz 14cm/sec, 8cm/sec, and 3cm/sec at argon pressure of 5x10-3m bar1x10-3 m bar 4x10-4mbar with 11cm T. S. D. , stylus dektak is used to determine thickness and the deposition rate in fig 4 at T. S. D.5, 8, and 11 cm for 400 m amp ion current at 5x10-4mbar Ar pressure. The substrate temperature was measured in fig 5 using platinum constantan thermocouple at ion current 200ma, 400ma, 600ma and at argon pressure 5x10-4m. bar, 1x10-3m bar and 5x10-3 m. bar. In view of the above studies performence of the scanning magnetron is obtained.