MEMS Based Acoustic Energy Harvester

There is an enormous and ever quenching need for energy. Sound is available everywhere in different types (in different domains) and can be harnessed. The principle objective of this project is to design and simulate an electromechanical acoustic resonator for reclamation of energy using microelectromechanical systems (MEMS) technology. Acoustic to mechanical transduction is achieved using a Helmholtz resonator, and mechanical to electrical transduction is accomplished using piezoelectric strip. The model with a cylindrical Helmholtz resonator and a Lead Zirconate Titanate (PZT) circular plate resonator was designed and analyzed using COMSOL MULTIPHYSICS 4.3a. In this study, a Helmholtz Resonator is used to collect travelling acoustic waves at frequencies of 4.5 kHz to 5.5 kHz. At the resonance of the Helmholtz Resonator, amplified resonant acoustic standing waves are developed inside the cavity. The pressure difference between the walls drive the vibration motion of the silicon membrane back plate, to which piezoelectric ring made of Lead Zirconate Titanate (PZT). The deformation induced as a result of this, leads to generate an electrical power via the direct piezoelectric effect.