STUDY THE SILICON OXIDE FILM WITH DIFFERENT WET CHEMICAL OXIDATION PARAMETERS TO GROW PASSIVATED CONTACT ON SILICON SOLAR CELL
Journal: International Journal of Electrical Engineering and Technology (IJEET) (Vol.13, No. 05)Publication Date: 2022-05-31
Authors : Thanh Pham Van;
Page : 85-89
Keywords : passivated contact; tunnel oxide; wet chemical oxidation;
Abstract
In this paper, we study the silicon oxide film(1.4nm) was grown by wet chemical oxidation method, and the change of different growing parameters in solar cell. With the heat treatment, the lifetime can be increased to 1108 us. Solar cell efficiency was improved from 10.8 % to11.5 %.
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