ANALYSING DIFFERENT GEOMETRIES OF MICRO HOTPLATES

During the last years, so called ‘Micro Hotplate’ has been developed in order to reduce the thermal mass of metal oxide gas sensor. Micro Hotplate consists of a thermally isolated stage with a heater structure, a temperature sensor and a set of contact electrodes for the sensitive layers. By using such Microstructures high operation sensors can be reached at comparably low power consumption (<100mW). Micro hotplates are generally micro heaters which work as plates and are available in different shapes and sizes as per their requirements and other parameters such as sensitivity , response time , power consumption , thermal expansion .