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Journal: International Journal of Engineering Sciences & Research Technology (IJESRT) (Vol.4, No. 7)

Publication Date:

Authors : ;

Page : 502-510

Keywords : Microhot plate; thermal mass; sensor; microstructures;

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During the last years, so called ‘Micro Hotplate’ has been developed in order to reduce the thermal mass of metal oxide gas sensor. Micro Hotplate consists of a thermally isolated stage with a heater structure, a temperature sensor and a set of contact electrodes for the sensitive layers. By using such Microstructures high operation sensors can be reached at comparably low power consumption (<100mW). Micro hotplates are generally micro heaters which work as plates and are available in different shapes and sizes as per their requirements and other parameters such as sensitivity , response time , power consumption , thermal expansion .

Last modified: 2015-07-20 22:46:52