ANALYSING DIFFERENT GEOMETRIES OF MICRO HOTPLATESJournal: International Journal of Engineering Sciences & Research Technology (IJESRT) (Vol.4, No. 7)
Publication Date: 2015-07-30
Authors : Nitish Kumar;
Page : 502-510
Keywords : Microhot plate; thermal mass; sensor; microstructures;
During the last years, so called ‘Micro Hotplate’ has been developed in order to reduce the thermal mass of metal oxide gas sensor. Micro Hotplate consists of a thermally isolated stage with a heater structure, a temperature sensor and a set of contact electrodes for the sensitive layers. By using such Microstructures high operation sensors can be reached at comparably low power consumption (<100mW). Micro hotplates are generally micro heaters which work as plates and are available in different shapes and sizes as per their requirements and other parameters such as sensitivity , response time , power consumption , thermal expansion .
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Last modified: 2015-07-20 22:46:52