Structural and sensing properties of nanostructured Titanium dioxide Thin Films

ABSTRACT TiO2 thin films were prepared by RF magnetron sputtering on to glass substrates. the thickness of the film were 100 nm and 200 nm. X-ray diffraction (XRD) analysis proposed that the deposited TiO2 films were formed with nanostructure with average crystallite size of 27 nm for 100 nm thickness and 32nm for 200 nm thickness 100 . These films were tested in (CO) gas. The sensitivity after 100 sec from exposed to CO gas at 100 ppm was 31% and 26% for 100 and 200 nm film thickness respectively.