Study of Ion Scattering Process by the Method of Binary Collision Approximation

In this paper presents the computer simulation method based on binary collision approximation for a study of low energy (E 0 = 1-15 keV) ion collisions on the surface of a solid and of the accompanying effect like namely scattering. The peculiarities of the process of correlated small angle scattering of 1–5 keV Ne Ar ions by the Cu(100) single-crystal surfaces have been investigated by computer simulation. It has been shown that under these conditions the inelastic energy losses become predominant over the elastic ones Kutliev Uchkun Otoboevich | Karimov Muxtor Karimberganovich | Narimonov Nurbek Davronbekovich "Study of Ion Scattering Process by the Method of Binary Collision Approximation" Published in International Journal of Trend in Scientific Research and Development (ijtsrd), ISSN: 2456-6470, Volume-1 | Issue-4 , June 2017, URL: http://www.ijtsrd.com/papers/ijtsrd133.pdf