NSTOA-13-RA-108 Comparison of the Effects of Varying of Metal Electrode in Metal-Insulator-Metal Diodes with multi-dielectric layers

Different metal–insulator–metal diodes using the fixedbottom electrode with different top electrodesandmulti–insulator layers were investigated. Chromium was usedfor the bottom metal electrode andTi, Cr, Al, and Pt were used asthe top metal electrode. The effects of tunneling junction and its effects in the diode performance were also studied. The high asymmetry value of 40, 16 and 6 were obtainedon applied voltage in the range of 0.5–3V respectively on using the Ti, Cr and Pt as the second metal electrode in the Metal–4 insulator layers–Metal diodes, while a combination of Cr–insulator layers–Al was shown relatively weak asymmetry curve.