CHARACTERISATION OF MAGNETRON SPUTTERED ZIRCONIUM OXIDE FILM: A REVIEW

This review paper describes the recent development & studies in both the fundamental and technological aspects of zirconium oxide. The previous researcher had a commentary on the structural and Mechanical properties of zirconium nitride, zirconium oxide, and zirconium oxy nitride thin films. In their studies they analyze the hardness, roughness, coefficient of friction etc.as per the application. The varied deposition method used are reactive sputtering, physical vapour deposition (PVD), Sol-gel etc. The aim of this paper is to review and to analyzed the current knowledge on the unique properties of zirconium oxides like Wettability, Optical and Tribological, properties.