Use of Micro-Electro Mechanical Sensors in Bearing Condition Monitoring: A Review DOI : 10.24247/ijmperdjun2020112

The rotary machines are widely used in industries and their maintenance is vital, as failures leads to increase in down time, lower production and profit to the industries. The rotary machines in industries have always been an area, where there is a scope to explore more and to achieve next gen-technology remains a challenge. In this regard, Micro-Electro Mechanical Systems (MEMS)-sensors are gaining wider acceptance and adoption for static and dynamic applications. Recent increase in demands for reliable Condition Monitoring (CM) has necessitated seeking alternatives to expensive conventional accelerometers to perform multi control and monitoring tasks. Owed to their size and cost, MEMS accelerometers are one of the alternative options. This review paper aims at discussing important MEMS-based sensors use in the rotary machine fault diagnosis.