A Phenomenological Analysis of MEMS-Based Sensor for Toxic Gas Sensing in Coal MineJournal: International Journal of Engineering Sciences & Research Technology (IJESRT) (Vol.2, No. 6)
Publication Date: 2013-06-30
Authors : Santanu Maity; Abhishek Kumar;
Page : 1572-1576
Keywords : Gas sensor; Micro Electro Mechanical System (MEMS); Micro machined.;
In coal mine different types of toxic gases are present. There is an increasing demand on toxic gas sensor for coal mine where the power consumption is a big issue. In this paper a simple structure of micro heater and inter digited electrode has been fabricated and micro machined structure for low power consumption is demonstrated. MEMS microheaters are designed and fabricated for entire two inch (2") process and 3mm X 3mm die sized microheaters obtained.
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