A Review of Uncertainty Measurement Method for Optical Dimensional Metrology Equipment

Nowadays the manufacturing process is more efficient and faster than ever, creating the need for more sophisticated, and accurate dimensional measuring devices. In this context, the development of non-contact dimensional metrology equipment has helped in manufacturing advances. But what if the measure done for these devices isn't as exact as it needs. The determination and correction of the uncertainty are crucial for the accuracy of the measurements. This paper analyses the actual state of the determination of uncertainty for non-contact dimensional metrology equipment, especially for the focal variation devices. The researchers found that at present time there isn't much progress in the determination of uncertainty for non-contact dimensional metrology equipment and further investigations need to be done.