DESIGN OF ELECTROSTATIC CO-OPERATION OF PROBE OF ATOMICFORCE MICROSCOPE WITH DIELECTRIC SURFACE

Results over of analysis of destructive factors of electrostatic co-operation between a silicic probe and dielectric surface were brought. An experimentally-statistical model over is brought such co-operation. Co-operation is taken to the minimum at the increase of humidity of environment to RH ? 85% or increase of mobility of carriers of charge to μ = 0,12…0,14 см2/(Вт?с). The increase of mobility of carriers of charge diminishes the errors of scan-out. As a result of it exactness of results increases on 20…22%.