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INVESTIGATION OF INTERNAL THERMOELASTIC STRESSES IN TIO2 FILM ON SAPPHIRE SUBSTRATE
Journal: International Journal of Civil Engineering and Technology (IJCIET) (Vol.10, No. 1)Publication Date: 2019-03-16
Authors : Yu. V. Klunnikova S. P. Malyukov A. V. Sayenko; Yu.N.Biyatenko;
Page : 227-232
Keywords : Devices; Film; Sapphire Substrate; Thermal Annealing; Thermoelastic Stresses;
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Abstract
We investigate thermoelastic stresses in titanium dioxide films on a sapphire substrate that arise during thermal annealing. The effect of thermal processes on thermoelastic stresses in titanium dioxide films has been studied experimentally. The obtained experimental results are in good agreement with the theoretical calculations of mechanical stresses in a titanium dioxide film.
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Last modified: 2019-05-20 17:05:07