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Numerical Simulation of a Microwave Argon PACVD Plasma Reactor at Low Pressure

Journal: International Journal of Science and Research (IJSR) (Vol.9, No. 12)

Publication Date:

Authors : ; ;

Page : 16-19

Keywords : Finite element method; COMSOL MWP module; microwave plasma; plasma fluid model;

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Discharge characteristics of argon microwave plasma were investigated by using fluid simulation of a MPACVD (Microwave Plasma Assisted Chemical Vapor Deposition) reactor based on finite elements method at low pressure (25-250) Pa. The microwave power was 2.45 GHz TM mode transmitted through the resonant cavity. Microwave power and pressure were considered simulation parameters and argon was used for working gas. A self-consistent fluid model was developed in Comsol Multiphysics Plasma Module for studying the discharge phenomena. The 2D plasma fluid model gives a complete description of spatial-and time evolution of the discharge characteristics such us: electron density and electron temperature. Simulation results show a strong effect of input parameters on the species densities distribution in the plasma.

Last modified: 2021-06-28 17:17:01