Design And Fabrication Of Thin-Film Optical Filters For Mid-Infrared Spectroscopy Application

Abstract This paper reports the design fabrication and results of thin film Fabry-Perot interferometer FPI for mid-infrared spectroscopy application. The system is designed to be integrated in a small portable spectrometer for the measurement of molecular absorption or emission as well as substance that has an infrared signature. The filter is based on Fabry-Perot interferometer and the wavelength of interest is in the mid-infrared 5 to 15 micrometers. The layers were selected carefully to minimize the thickness required to meet the quarter-wave optical-thickness criteria for the interferometer.