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AN INVESTIGATION OF SILICON DIOXIDE THIN FILMS MODIFIED WITH CARBON
Journal: Paradigmata poznání (Vol.6, No. 4)Publication Date: 2019-11-20
Authors : A. V. Kharkavyy K. T. Ashurova;
Page : 11-13
Keywords : silicon dioxide; porous films; modified films; porometry; permittivity; sputter deposition;
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Abstract
This paper represents the relevance of obtaining porous materials and modes of their application. Also, the data about the preparation of silicon dioxide thin films in different modifications are shown. The effect of carbon on the porosity of the structure is assessed. A statistical analysis of the obtained samples is carried out. The relation between the modification of silicon dioxide thin films and their electrical properties is described
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Last modified: 2019-12-24 17:10:21