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AN INVESTIGATION OF NIOBIUM PENTOXIDE THIN FILMS MODIFIED WITH CARBON
Journal: Paradigmata poznání (Vol.6, No. 4)Publication Date: 2019-11-20
Authors : A. V. Kharkavyy K. T. Ashurova D. A. Luzhaytsev V. V. Malinovskaya;
Page : 14-17
Keywords : niobium pentoxide; porous films; modified films; permittivity; sputter deposition;
Source : Download Find it from : Google Scholar
Abstract
This paper represents the method of obtaining niobium pentoxide thin films in various modifications. The comparative analysis of produced structures is carried out. The effect of carbon on the porosity of the struc- ture is assessed, as well as the amount of pores in modified structure.is defined. The relation between the modifi- cation of silicon dioxide thin films and their electrical properties is described
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Last modified: 2019-12-24 17:11:39